The vacuum deposition furnace is composed of a deposition chamber, a gas supply system and an exhaust system. It is a production equipment that uses resistance heating or induction heating to pass the deposition gas in a vacuum environment and produce pyrolysis at high temperature and deposit it on

Chemical vapor deposition (CVD) is a kind of chemical technology, which mainly uses one or several gaseous compounds or elements containing thin film elements to produce thin film by chemical reaction on the surface of substrate. Chemical vapor deposition furnace is a new technology for preparing in