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Vacuum Deposition Furnace

The Vacuum deposition furnace is used for the preparation of carbon-carbon composite...
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Vacuum deposition furnace


The Vacuum deposition furnace is used for the preparation of carbon-carbon composite materials, and the deposition furnace is mainly used for the preparation of pyrolytic carbon coating on the surface of graphite, semiconductor devices and heat-resistant scour materials.

Scope of application:

Graphite, semiconductor devices, heat-resistant scour materials.

1. Basic Parameters:

1) Design temperature: 1250℃/1650℃/1800℃/2200℃

2) Common temperature: 900~1200℃

3) Vacuum degree: < 50Pa

4) Pressure rise rate: 6.67pA /h(or 150Pa/24h) in cold state of empty furnace

5) Heating mode: graphite resistance heating or induction heating, independent temperature control, good temperature uniformity

6) Atmosphere medium: vacuum /CH4/C3H6/H2/N2/Ar

7) Gas control mode: mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;

Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up;

8) Furnace type: square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability;

9) Furnace cooling mode: furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production efficiency;

2. Structure of vacuum deposition furnace:

Structure form: horizontal - side discharge, vertical - up/down discharge

Furnace door locking mode: manual/automatic

Furnace shell material: inner stainless steel/all stainless steel

Insulation material: carbon felt/graphite felt/carbon fiber cured felt

Heater, muffle material: graphite /CFC

Infrared instrument: single colorimetric/double colorimetric

Power supply: KGPS/IGBT(only suitable for medium frequency heating)


3、Product Specification

Parameter /Model No.

GJC-0305-C

GJC-0505-C

GJC-0608-C

GJC-0612-C

GJC-0812-C

GJC-1120-C

GJC-1218-C

GJC-1520-C

Working Zone Size

φ×H(mm)

300×500

500×500

600×800

600×1200

800×1200

1100×2000

1200×1800

1500×2000

Highest Temperature

(℃)

2300

2300

2300

2300

2300

2300

2300

2300

Temperature uniformity(℃)

±5

±5

±5/±7.5

±7.5/±10

±7.5/±10

±10/±15

±10/±15

±15/±20

Limit Vacuum DegreePa

1-100

1-100

1-100

1-100

1-100

1-100

1-100

1-100

Pressure rise rate

(Pa/h)

0.67

0.67

0.67

0.67

0.67

0.67

0.67

0.67

Heating method

·

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction

Resistance/induction


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